Abstrato
On controlling of gas and heat transport in a vertical reactor process to improve properties of epitaxial layers
E.L.Pankratov, E.A.Bulaeva
In this paper we analyzed mass and heat transport in a reactor from gas phase during growth an epitaxial layer. Based on results of the analysis we analyzed dependences of properties of grown layers on parameters of technological process.
Isenção de responsabilidade: Este resumo foi traduzido usando ferramentas de inteligência artificial e ainda não foi revisado ou verificado
