Artigo original
On controlling of gas and heat transport in a vertical reactor process to improve properties of epitaxial layers
E.L.Pankratov, E.A.Bulaeva
E.L.Pankratov, E.A.Bulaeva
AliA.M.Yassene, M.Abd El-Rahman
Milad Jadidoleslami, Farshad Farahbod, Hamzeh Hasani